Solid State Sensors to shape the future of Medical Imaging - From Technologies to Markets - EPRISE

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Solid State Sensors to shape the future of Medical Imaging - From Technologies to Markets - EPRISE
From Technologies to Markets

   Solid State
Sensors to shape
  the future of
 Medical Imaging

                                            © 2019
Solid State Sensors to shape the future of Medical Imaging - From Technologies to Markets - EPRISE
Introduction to Yole

                 © 2019
Solid State Sensors to shape the future of Medical Imaging - From Technologies to Markets - EPRISE
YOLE DEVELOPPEMENT – FIELDS OF EXPERTISE

Life Sciences                                                    Semiconductor                           Semiconductor
& Healthcare                                                       & Software                               & Software
o   Microfluidics                                                                             o   Package,Assembly & Substrates
o   BioMEMS & Medical Microsystems                                                            o   Semiconductor Manufacturing
o   Inkjet and accurate dispensing                                                            o   Memory
o   Solid-State Medical Imaging & BioPhotonics                                                o   Software & Computing
o   BioTechnologies
                                                    Life                         Photonics,
                                                 Sciences &                       Sensing
                                                 Healthcare
                                                                                 & Display

Power                                                                                                         Photonics,
& Wireless                                                                                             Sensing & Display
o    RF Devices & Technologies                                                                o   Solid-State Lighting
o    Compound Semiconductors & Emerging Materials             Power & Wireless                o   Display
o    Power Electronics                                                                        o   MEMS, Sensors & Actuators
o    Batteries & Energy Management                                                            o   Imaging
                                                                                              o   Photonics & Optoelectronics

                                                                                                                                  3
Solid State Sensors to shape the future of Medical Imaging - From Technologies to Markets - EPRISE
LS&H: FIELD OF EXPERTISE
    5 Activities

Lab-on-a-chip     bioMEMS         Inkjet   Medical Imaging                     Biotechnologies
/ Microfluidics   /Microsensors            / biophotonics

                                                             ©2019 | www.yole.fr | X-ray technology trends   4
Solid State Sensors to shape the future of Medical Imaging - From Technologies to Markets - EPRISE
LS&H TECHNOLOGIES & RELATED APPLICATIONS

                           Solid state Medical Imaging & biophotonics

     Courtesy of Pyxalis                    LS&H
                                           Division

                                                                        X-ray flat panels
                                                                        Endoscopy cameras
                                                                        Ultrasound technology
                                                                        MRI
                                                                        Microscopy Life Sciences Cameras
                                                                        Silicon photonics
                                                                        …
                                                                                                           5
Solid State Sensors to shape the future of Medical Imaging - From Technologies to Markets - EPRISE
Solid State Medical Imaging

                        © 2019
Solid State Sensors to shape the future of Medical Imaging - From Technologies to Markets - EPRISE
HISTORICAL SYNERGIES
                   Technology/product roadmap
                                                                                                                                                          TFT IGZO - flexible
                                                                                                                                     CdTe-based technology
                                                                                                         Semiconductor
                                                                                                                                                                                pMUT
                                                                                                         technologies
                                                                                   CCD sensor                                                      Octogonal and round image
                                                                                                                                                             sensor
                                                                                                                              SiPM
                                                                                                    CMOS sensor                        TODAY                                     2022

                                                        Analog x-ray films                                                               2017

                           PMT tubes                                                                     1995
                                                                                     1980
                                                                                                                                 Chip-to-the-tip
                                                                     1970                                                         endoscope                          Tiny camera endoscopy

                                                                                                    First PET/CT scans - GE
                                       1930                                                                                                   Ultraportable ultrasound
                                                  First fiberoptic endoscope                                         Digital imaging
                                                                               World’s first developed
                                                                                        MRI

X-ray discovered

                                                             First developed CT scanner
            1895           X-ray machine - 1920                                                 First intra-oral detector              CdTe detection
                                                                                                                                                                  Photon-counting CT scanner

                                                                                                                                                                                               7
Solid State Sensors to shape the future of Medical Imaging - From Technologies to Markets - EPRISE
WHAT IS SOLID-STATE?
          Technology transformation

                  Incoming wave        Scintillation   Sensor    Electronics
                                       focusing

                  Gamma ray, x-ray,                                                            Scintillation
                                                                               Incoming wave                       Sensor          Electronics
 In our report,   visible                                                                      focusing
                                                        Tube
« solid-state »
    refers to
   electronic
  components,
  devices, and     Ultrasound, x-ray
systems based                                          Crystal
       on
semiconductor
     and IC
   processes

                                                                                                                 Solid-state
                                                                                                                 sensors,
                                                                                                                 CIS,
                                                                                                                 MEMS, etc.

                                                                                                         ©2019 | www.yole.fr | X-ray technology trends   8
Solid State Sensors to shape the future of Medical Imaging - From Technologies to Markets - EPRISE
Focus on X-Ray Imaging
Solid State Sensors to shape the future of Medical Imaging - From Technologies to Markets - EPRISE
DIGITAL X-RAY MARKET
      A succession of disruptive innovations

A history                                      What’s next ?
spanning
120 years

                                                           10
DIGITAL X-RAY DETECTORS - TECHNOLOGY LANDSCAPE
                               CCD image-intensified
                                                               aSi FPD                 aSe                   CMOS FPD             IGZO FPD           Photon counting
                                     camera
Detec-
 tion
                                     Indirect                  Indirect              Direct                    Indirect             Indirect               Direct

                                                                                      Field electrode
                                                                                      Dielectric layer
     Main components

                                                                                                                                                             CdTe
                                                                                      a-Selenium layer
                                                                                                                                                             photoconductor
                                                                                      Charge electrode
                                                                                                                                                           Indium bump

                                                                                           electron                                                           electrons
                                                                                           s
                                                                               +                                                                     +

                                                                                                                               • Electron mobility
Advantages

                                                       •   Very large panels                                                   • High resolution     • High resolution
                           •   High resolution                                 •   Higher                •   High speed
                  +                                        possible                                                            • Manufacturability   • Low noise
                                                                                   absorption            •   High resolution     : standard TFT      • Multi-energy CT
                                                       •   Economical
                                                                                                                                 Fab
Drawbacks

                       -   •   Bulky                   •   Low resolution      •   Expensive             •   Limited size      • Supply chain not    •   Expensive
                           •   Low field of view       •   Slow                    solution              •   Expensive           ready yet               solution

                                                             Current technologies                                                  Emerging technologies
                                                                                                                                                                          11
TECHNOLOGIES POSITIONING

                                            General
 Large
>100µm
                                          radiography       Low
                                                           < 5Hz

Pixel                                                      Frame
                        3D dental and        Mammography    rate
size
                        mammography
                         fluoroscopy/                       High
 Small                 dynamic imaging                     >20Hz
< 40µm
           Dynamic
           imaging
         fluoroscopy

              Small         Medium           Large

                          Detector size

                                                                   12
TECHNOLOGIES POSITIONING

                                              General
 Large
>100µm
                                            radiography             Low
                                                                   < 5Hz

Pixel                                                              Frame
                          3D dental and         Mammography         rate
size
                          mammography
                           fluoroscopy/                             High
 Small                   dynamic imaging                           >20Hz
< 40µm
             Dynamic
             imaging
           fluoroscopy                                                                               a-Si FPD
                Small         Medium            Large

                            Detector size                                                              A-Se FPD
                                                                                    CMOS
  • Each technology dominates in a specific medical application.
                                                                                     FPD
  • Mammography and dental are moving towards a 3D tomography
    approach favoring CMOS flat panel                                      CCD

  • Fluoroscopy (real-time imaging) benefits from CMOS thanks to            Small      Medium         Large
    lower dose and speed.
                                                                                     Detector size

                                                                                                                  13
TECHNOLOGIES POSITIONING

                                                                           CMOS flat-panel detectors are positioned
                                                                             in applications requiring medium-size
                                              General                      panels AND high resolution OR high speed
 Large
>100µm
                                            radiography             Low
                                                                   < 5Hz

Pixel                                                              Frame
                          3D dental and         Mammography         rate
size
                          mammography
                           fluoroscopy/                             High
 Small                   dynamic imaging                           >20Hz
< 40µm
             Dynamic
             imaging
           fluoroscopy                                                                                   a-Si FPD
                Small         Medium            Large

                            Detector size                                                                  A-Se FPD
                                                                                       CMOS
  • Each technology dominates in a specific medical application.
                                                                                        FPD
  • Mammography and dental are moving towards a 3D tomography
    approach favoring CMOS flat panel display                               CCD

  • Fluoroscopy (real-time imaging) benefits from CMOS thanks to               Small       Medium         Large
    lower dose and speed.
                                                                                         Detector size

                                                                                                                      14
TECHNOLOGY TRENDS
    New technologies coming from the display world : IGZO and LTPS
                                                             Performance

• a-Si remains the dominant technology for entry                                                  Improving performance
  level displays for both small and large displays                                    “The        (process, new materials,
                                                                                                      new structures)                Samsung Galaxy S6
                                                                                    ideal TFT                                            (577ppi)
                                                                                    Material”                                LTPS
                                                           High End smartphone
                                                                       AMOLED
• LTPS (low temperature polycrystalline silicon) is              (high PPI), LCD
  rapidly increasing market shares for high end                                            Decreasing
                                                                                             cost        IGZO,
  mobile displays.                                                                                       Other
                                                           High end AMOLED TV
                                                            (4K, >240Hz refresh)                          Metal
                                                                                                                                      LG OLED TV
                                                                                                         Oxide                        (2k1k, 4k2k)
                                                                   AMOLED TV
• IGZO (indium gallium zinc oxide) have long
  been seen as a potential ideal “high
  performance/low-cost” TFT technology.                            AM TFT LCD
                                                             (smartphone, laptop,
                                                                        TVs…)
                                                                                        a-Si
                                                                        E-Paper

                                                                                                                                    Cost
                              From Yole report “Organic TFT 2016: Flexible Displays and other Applications”                                          15
TECHNOLOGY TRENDS
     New technologies coming from the display world : IGZO and LTPS
                  IGZO and LPTS are technologies coming from the consumer market : mobile phones, tablets,TVs, etc.

                  IGZO key features:                                     LPTS key features:
                        •   Electron mobility (20-50 times better than         •   Electron mobility (100 times better than aSi)
                            aSi)                                               •   High resolution and high pixel density
IGZO is the             •   Higher resolution                                  •   But expensive to manufacture and difficult to
next                    •   Substrate flexibility (glass or polymer)               go for large panels
disruptive TFT
technology in           •   Manufacturability : in standard TFT Fab
the field of X-
ray imaging

                                         Source: Sharp                                               ©2019 | www.yole.fr | X-ray technology trends   16
DIGITAL X-RAY - TECHNOLOGY TRENDS
      New technologies coming from the display world : IGZO and LTPS
                  IGZO and LPTS are technologies coming from the consumer market : mobile phones, tablets,TVs, etc.

                  IGZO key features:                                     LPTS key features:
                        •   Electron mobility (20-50 times better than         •   Electron mobility (100 times better than aSi)
                            aSi)                                               •   High resolution and high pixel density
IGZO is the             •   Higher resolution                                  •   But expensive to manufacture and difficult to
next                    •   Substrate flexibility (glass or polymer)               go for large panels
disruptive TFT
technology in           •   Manufacturability : in standard TFT Fab
the field of X-
ray imaging                      Next big trend in X-ray imaging

                                         Source: Sharp                                               ©2019 | www.yole.fr | X-ray technology trends   17
DIGITAL X-RAY - TECHNOLOGY TRENDS
      IGZO : first products available

                The 3131Z flat panel detector is the first   Jupi 1212X is new generation FPD developed by
                Varex IGZO based FPD.                        iRay with IGZO sensor technology for real-time
                It is used for Surgical and Dental           imaging.
                applications with a 100 µm pixel size.       It is used for interventional procedures.
Varex and                                                    iRay has IGZO FPDs used for mammography,
iRay                                                         fluoroscopy and dental imaging.
demonstrated
their first
IGZO
products for
X-ray imaging

                                                                                         ©2019 | www.yole.fr | X-ray technology trends   18
DIGITAL X-RAY - TECHNOLOGY TRENDS
    Photon counting
                                                                  Source : Siemens
   Advantages of Photon Counting detectors in
   CT:
        •   Higher spatial resolution
        •   Lower noise
        •   Lower dose
        •   Spectral information available, multi-
            energy CT

   CdTe-based sensors have entered the dental
   market via Sirona’s products, but photon
   counting CT are still under development.

   The first commercial products should be
   available by 2021.                                Photon-counting CT
                                                     scanner at the NIH’s
                                                     Clinical Center

                                                                                 19
DIGITAL X-RAY MARKET
         A market segmented by end-application

                    General radiography          Computed tomography
                                Radiography
                                                                           CT scan

A broad
applications                    Mammography           Dental x-ray
portfolio

                                                                          Intra-oral
                    Interventional & surgery
                                                                         3D CBCT
                                   C-arm

                                                        Extra-oral
                                                                      2D extra-oral
                                                                       panoramic
                                 Fluoroscopy

                                                                     ©2019 | www.yole.fr | X-ray technology trends   20
DIGITAL X-RAY IMAGING - MARKET DRIVERS

                        Cost                                                           Dose
        Initial price & cost of ownership                                     → High sensitivity detector
        → Detector represents a large
        portion of the system price

              Early diagnostic                                                 Exam duration
              → high resolution                                               → High acquisition speed

                                                Multimodality
                                            → Versatile, portable detector:
                                            wireless, battery-powered

                                                                                                            21
MARKET DATA AND FORECAST, BY APPLICATION

                               Solid state sensor market 2018-2024 by application (in $M)
               500
               450
               400                                                                              CT Scanner
               350                                                                              X-ray Dynamic
               300                                                                              X-ray Mammograpy
Today, x-ray   250
                                                                                                X-Ray Static
medical is     200
               150                                                                              X-Ray Extraoral 3D
almost
exclusively    100                                                                              X-Ray Extraoral 2D
based on        50                                                                              X-Ray Intraoral
solid-state      0
sensors.              2018      2019      2020      2021      2022     2023      2024

               • CT scanner and X-ray static applications represent the majority of sensor sales.
               • Mammography and interventional/surgery applications use smaller sensors, but 2016 - 2022
                 growth will be quite dynamic.

                                                                                         ©2019 | www.yole.fr | X-ray technology trends   22
MARKET DATA AND FORECAST, BY TECHNOLOGY

                               Solid state sensor market 2018-2024 by technology (in $M)
                500

                400
                                                                                                IGZO
                300                                                                             Si Photodiode array
The first                                                                                       CMOS
                200
IGZO flat                                                                                       a-Si
panels will     100                                                                             CCD
be
integrated as    -
early as 2020           2018      2019     2020      2021     2022      2023     2024
                • Si photodiode array corresponds to the CT scanner market and is expected to increase with
                  a 4,9% CAGR between 2018 and 2024.
                • CMOS market shares are expected to grow until 2022 but IGZO flat panels will gain market
                  share when the technology will be available.
                • As a cheaper solutions with good technical features aSi will stay the main sensor technology
                  in the field of X-ray imaging (without CT scanner).
                                                                                         ©2019 | www.yole.fr | X-ray technology trends   23
X-RAY IMAGING: SUPPLY CHAIN
                Sensor design      Front-end    Detectors                               OEM

                Sensor design   Manufacturing    Packaging/                         Medical
                                                  assembly                         equipment

After a wave
of M&A
activity the
supply chain
consolidation                       IDM or          Medical                           Medical
is now          Design houses                                                         device
                                   Foundries        device
beginning to                                       company                           company
bearfruit

                                                              ©2019 | www.yole.fr | X-ray technology trends   24
X-RAY MEDICAL IMAGING: SUPPLY CHAIN
                       Sensor design   Front-end   Detectors                             OEM

                CMOS

Asian players
are coming to
the market
with
interesting
products at
lower price
                aSi

                                                               ©2019 | www.yole.fr | X-ray technology trends   25
X-RAY SENSOR TECHNOLOGY ROADMAP
                                                                                          Single-photon
                                                                                             counting
              Improved
              cost/performance                                                     IGZO
                                                                                                                CdTe
                                                                   CMOS FPD

                                                        A-Se FPD
                                                                                                   IGZO

                                           a-Si FPD
                                                                                           CMOS
                                                                                            CdTe

Toward                   CCD image-
                                                                                          aSe
lower dose            intensified camera

and more                                                                            aSi
information
                   CCD

                   1980s           2000s               2010s            2018              2020s            2024

                                       - Less bulky                - Lower noise                           - Lower dose
                                                                   - Higher speed and resolution           - Multi-spectral imaging
                                       - Improved quality
                                                                   - Higher integration

                                                                                                    ©2019 | www.yole.fr | X-ray technology trends   26
Focus on ultrasound
       technologies

                © 2019
ULTRASOUND TECHNOLOGY
    History
                                                                                                                                  2017 – Butterfly probe
                                                                                                                   2016 –         based on CMUT
                                                                                             2009 - Hitachi –      Fingerprint
                                                                                             Mappie probe          sensor based
                                                                                             based on CMUT         on PMUT

                       1958 - Ultrasound for obstetrics
                                                                                                                                     2018
                                                                                                            1994
                                                       1960 - Metal flaw detectors

 Hyperphonography, first medical imaging
                                                                                 1960
 system for diagnosis – inventor: Karl Theodore                                      1980 - 1st generation PMUT

                                                           1947
                                                                                                              1994 - 1st generation CMUT
 Dussik, Austria

                                                                                                                           2016 – PMUT based module
    Langevin triplet for Sonar            1917
                                                                       Quartz ultrasound generator

                                1794         Classical Langevin transducer
Discovery of ultrasounds

                                                                                        Discover of PZT material                         ©2019 | www.yole.fr | X-ray technology trends   28
PMUT AND CMUT TAKE-OFF

                                                       Module
                                                                                                                Courtesy of
                                Technology           integration                                                Butterfly Network
      Courtesy of Philips     readiness at the        readiness
                              transducer level        (assembly,
                                                    manufacturing)

                Interest of new
                players through                                   Emergence of
                investment and               PMUT                new applications
                  acquisitions
                                               and
                                             CMUT
                                            take-off !

                                                                     Confidential | Medical MEMS & Sensors 2018 | www.yole.fr | ©2018   29
DRIVERS FOR NEW APPLICATIONS IN ULTRASOUND IMAGING

                                           Drivers for new
                                          applications using
                                             ultrasound
                                               imaging

                                                         Ultra-portable
       Miniaturization       Democratization                              More readable
                                                            systems

                                                                                        Solid state
                         Impact on ultrasound transducer requirements:              technologies could
                         ✓ Reduce transducer size                                   help resolve some
                         ✓ Reduce cost                                                 of these new
                         ✓ Electronics integration                                   requirements for
                         ✓ Improve image quality                                        ultrasound
                         ✓ New functions to help users for diagnosis
                                                                                       transducers

                                                                                                         30
CMUT VS. PMUT VS. BULK PIEZO
     Frequency and application dependent

 Frequency
 dependent,                               Bulk Piezo
 MUT could
reach higher                                              CMUT
frequencies.
                                                PMUT

               1KHz                           1MHz                                          10 MHz
                                                 Lithotripsy

                                                                          Medical imaging
                              Dentistry
                                                 Tissue ablation - HIFU
                                                                                                     31
PENETRATION OF CMUT/PMUT TECHNOLOGIES

                                                  Ultrasound modules market data and forecasts in medical ultrasound by
                                                                   technology (2017-2023, in units)
                                        400,000

                                        350,000

                                        300,000

                             In units
                                                                                                                          Bulk PZT based modules
                                        250,000

                                        200,000

                                        150,000

                                        100,000

                                                                                                                          MUT based modules
                                         50,000

                                             -
                                                       2017     2018      2019     2020      2021     2022     2023   CAGR 2017-
                                                                                                                        2023

   •   There are already products on the market using CMUT technologies, such as Hitachi probes or Verasonics/Vermon, Kolo
       Medical and some IVUS and endoscopic products, but these are still niche markets.
   •   The real disruption is coming first with the Butterfly Network with product available end 2018 based on a CMUT probe, and
       the eXo Imaging product based on a PMUT probe, but probably not available before 2020.

                                                                                                                                                   32
THANKS FOR YOUR ATTENTION!

       Some slides from this presentation have been taken from the following report:

                                            Solid State Medical Imaging
                                Released in Jan. 2017 – More info on www.i-micronews.com
                                                    240+ slides report

                            Ultrasound Sensing Technologies for Medical, Industrial, and
                                Released in 2018 – More info on www.i-micronews.com
                                                 200+ slides report

                          Contact: Marjorie Villien
                          Email: villien@yole.fr

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