Instytut Technologii Elektronowej
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Instytut Technologii Elektronowej
Research Activities and Opportunities
for Collaboration (Division of Silicon
Microsystem and Nanostructure Technology)
Dr. Tomasz Bieniek
1
Tomasz Bieniek, Grzegorz Janczyk
Successful R&I in Europe 2019 - 10th European Networking Event am 14-15.02.2019 in Düsseldorf tbieniek@ite.waw.pl
Instytut Technologii Elektronowej (ITE)
Institute of Electron Technology (ITE) is a public, Polish, non-profit research organization,
located in Warsaw (Piaseczno, Krakow), Poland, carrying out applied research and close-
to-market innovation (TRL 3 to 8) in microelectronics, photonics and microsystem domain.
Photonics Integrated Micro- Si- Microsystem Micro- and Materials and Design and Certification
Circuits Electronics and Nanotechnology Semiconductor diagnostics of
and Systems (Krakow) Nanostructure of Wide Bandgap Structures electronic
Design Technology Semiconductors Research
*
nanostructures and
(Piaseczno) components
The mission of the Institute is to conduct the basic and applied rese-
arch in the field of semiconductor electronics and physics in order to
develop and commercialize innovative micro- and nanotechnologies
and their applications in semiconductor microelectronics, optoelec-
tronics, photonics and micromechanics.
* Integrated Circuits & Systems Development – the R&D Activities and Collaboration Opportunities for customized sensor networks, power electronics
and telemedicine by G. Janczyk, session ICT, 14:15, room Amsterdam 1
Dr. Tomasz Bieniek
Successful R&I in Europe 2019 - 10th European Networking Event am 14-15.02.2019 in Düsseldorf tbieniek@ite.waw.pl
2
Area of Interest & R&D Domains
Silicon technological R&D line with full CMOS and MEMS processes:
• Total Clean Room Area approx. 1200 sq. m. , • Silicon wafers – mainly 100mm and 150mm
• Cleanliness class 1000 and 100 up to 10 (lithography) • Lithography linewidth 0.9 µm (e-beam 30-100nm)
R&D Domains: Full set of CMOS/MEMS technology &
• MEMS/MOEMS devices based on silicon micromachining measurement equipment including:
• Sensors and Actuators (based on silicon and non-silicon • Full Photolithography cluster (incl. 3D photoresist
technology) deposition)
• Advanced CMOS (FDSOI) technologies • Laser mask & direct writing tool.,
• Silicon micro- and nano-probes • Mask shop (mask fabrication, up to 6”)
• Bio-compatible microelectrodes for medical implants • Deep Silicon RIE (bosch process, cryo proc.)
• MEMS/MOEMS design, modeling & simulation • Plasma cluster (etching, PECVD, 5 reactors)
• Customer specific detectors and photodiodes (incl. • Thermal processes cluster (ox.; diff; anneal)
avalanche) • Metallization cluster (Al, alloys, Au, Pt, Ti, Cr, others)
• Energy harvesting devices (mechanical, thermal, photo) • CVD cluster (incl. LPCVD, low. temp. dep)
• Integration of various silicon and non-silicon micro- • Assembly cluster (cutting/wire & die bonders)
technologies • Wet chemistry processing cluster (clean/etching)
• Characterization (optical, electrical, mechanical, etc…) • Ion implantation (ion beam, immersion plasma)
• Assembling, bonding, heterogenous integration • Characterization & diagnostic (opto, elect. SEM, …)
We are FLEXIBLE & customer oriented !!!!
Dr. Tomasz Bieniek
Successful R&I in Europe 2019 - 10th European Networking Event am 14-15.02.2019 in Düsseldorf tbieniek@ite.waw.pl
3
Area of Interest and Partner Profiles
Offered activities:
• Partnership in research (H2020, ECSEL, bilateral) – ICT, materials, IoT, power
• Partnership in business
Our role: partner, coordinator, subcontractor, R&D
Specialized services in:
• Design (product, module, component), synthesis
• Technology processing
• Measurements, characterization
• Packaging, assembly, integration
• Testing
• Low volume production
Prototype technology for specialized devices:
• Sensors, detectors, microsystems, readout IC
• Signal processing
• Data processing etc…
• Certification services
Dr. Tomasz Bieniek
Successful R&I in Europe 2019 - 10th European Networking Event am 14-15.02.2019 in Düsseldorf tbieniek@ite.waw.pl
4
Reference projects:
Centrum Nanoelektroniki, Mikrosystemów i Fotoniki, Wykorzystanie działalności badawczo-rozwojowej w
gospodarce (Strategia rozwoju Polski Centralnej do roku 2020 z perspektywą 2030, 2018 – 2020, 70MPLN
~16MEuro)
REACTION - first and euRopEAn siC eigTh Inches pilOt line (2018 – 2022) ECSEL H2020
R3-PowerUP - 300mm Pilot Line for Smart Power and Power Discretes (2017 - 2021) ECSEL H2020
Lab4MEMS-II - Micro-Optical MEMS, micro-mirros and pico-projectors (2014 – 2018) ENIAC JU (ECSEL)
SESBE - Smart Elements for Sustainable Building Envelopes (2013 2017) FP7
CarriCool - Modular Interposer System Architecture providing scalable Heat Removal, …(2014 – 2017) FP7
Lab4MEMS - LAB FAB for smart sensors and actuators MEMS (2013 – 2016) ENIAC JU (ECSEL)
Nanoheat - MultidomaiN plAtform for iNtegrated MOre-tHan-MoorE/Beyond CMOS systems … (2012 – 2016) FP7
SIMS - Scientific Infrastructure Management Support (2013 – 2015) Operational Programmes Human Capital
SMAC - SMArt systems Co-design (2011 – 2015) FP7
PARSIMO - Partitioning and modelling of system-in-package (2011 – 2014) ENIAC JU (ECSEL)
SmartFrame (2011 – 2014) ERDF
e-BRAINS - Best-Reliable Ambient Intelligent Nano Sensor Systems (2010 – 2014) FP7
Nano-Tec - Nano Ecosystems Technology and Design for Nanoelectronics (2010 – 2013) FP7
MINTE – Mikrosystemy i nanotechnologie elektroniczne dla innow. gosp. (2009 – 2013) POIG
MNS-DIAG - Mikro- i Nano Systemy w Chemii i Diagnostyce Biomedycznej (2007 – 2013) POIG
CORONA - Customer-Oriented Product Engineering of Micro and Nano Devices (2008 – 2011) FP7
SE2A - Nanoelectronics for Safe, Fuel Efficient and Environment Friendly Autom. Sol. (2009 – 2011)
e-CUBES, INTEGRAMplus, SUCIMA…..
and many more: http://www.ite.waw.pl/en/projekty/european-projects/
Dr. Tomasz Bieniek
Successful R&I in Europe 2019 - 10th European Networking Event am 14-15.02.2019 in Düsseldorf tbieniek@ite.waw.pl
5
Instytut Technologii Elektronowej
Division of Silicon Microsystem and Nanostructure Technology
Dr. Tomasz Bieniek
tel.: +48 22 279 32 00
email: tbieniek@ite.waw.pl
Department of Integrated Circuits and Systems Design
Dr. Grzegorz Janczyk
Tel.: +48 22 548 78 50
email: janczyk@ite.waw.pl
www.ite.waw.pl
https://www.youtube.com/user/ElectronTechnology
Dr. Tomasz Bieniek
Successful R&I in Europe 2019 - 10th European Networking Event am 14-15.02.2019 in Düsseldorf tbieniek@ite.waw.pl
6
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