Sustainability Program - Version 02/ Update 2013 Semiconductor Metrology Systems
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Sustainability Program
‐ Version 02/ Update 2013 ‐
Semiconductor Metrology Systems
1
Dear valued partners, Innovation, trusted partnerships as well as sustainability in all our business processes are the foundation of our success. In 2012 we published our first ZEISS SMS sustainability report to emphasize our strength in these areas and to give our partners, employees and the public a deep insight in our company. Since then we made huge efforts in developing our business in terms of sustainability. We implemented certain sustainability projects with already visible results and set challenging targets to reduce consumptions and emissions. We are pleased that our customers and partners honored that e.g. by granting us the Intel Preferred Quality Supplier Award (PQS) and the successful management system audits in 2013. We are now publishing our first sustainability report. It contains two additional indicators: Labor and Human Rights. Visualizing more indicators related to the sustainability of our specific business will further increase transparency and makes our engagement measurable. I would like to thank all employees, customers and business partners for their cooperation and efforts assuring that ZEISS SMS will continue to be a reliable partner. Dr. Oliver Kienzle Managing Director Carl Zeiss SMS GmbH
Table of contents 1. Introduction to the SMS sustainability program....................................................................................................................................................................... 4 2. Semiconductor Metrology Systems.......................................................................................................................................................................................... 6 3. Metrics, Trends and Results ....................................................................................................................................................................................................10 3.1. Environment ......................................................................................................................................................................................................................10 3.2. Labor, Human Rights, Health & Safety ...............................................................................................................................................................................12 3.3. Sustainability Projects – Achievements (first report) ..........................................................................................................................................................14 4. Summary ................................................................................................................................................................................................................................18
1. Introduction to the SMS sustainability program
To be more comprehensive and transparent for our stakeholders, we are
committed to sustainability reporting. Within this Document, we showcase
our achievements and challenges and provide detailed information about
our actions in terms of sustainability. This also contains the first report
based on our sustainability program, first published in September 2012.
ZEISS – A sustainable company1
The sparing use of resources is of central importance in product
development at ZEISS: care is always taken to maximize energy efficiency in
the company’s instruments and to minimize material usage through
innovative production processes and equipment. With its products, ZEISS
supports sustainability in many different sectors: the company develops
intelligent measuring systems that are utilized for quality inspection in the
energy, automotive and aerospace industries. These systems are used, for
example, to test the quality of large wind turbine components and thus
ensure a high level of efficiency. ZEISS is also working on the enhancement
of alternative drive technologies and the ongoing development of
ZEISS – Portfolio
electromobility. ZEISS is involved in various projects in the field, e.g. the
optimization of production systems for powerful battery systems.
Innovation is a way of life at Carl Zeiss.
The company has stood for innovation for more than 160 years. The research and development teams work intensively to constantly expand the company’s technology leadership.
The ownership structure of Carl Zeiss AG – with the Carl Zeiss Foundation as the sole shareholder – ensures that investments in innovations can be made with vision and foresight. Each
fiscal year, a significant percentage of the company’s overall revenue is being invested in research and development activities.
ZEISS plays an active role in society. The company focuses on sustainability – whether environmental protection and energy strategies, commitment to society at the company’s sites or
supporting educational and scientific projects and institutions.
ZEISS is very committed to regional dedication at the company’s sites. The Group therefore created the Carl Zeiss Promotion Fund. Based on the concept of “with society, for society
and in the midst of society”, the fund sponsors social, youth, cultural and amateur sports projects. For fiscal year 2011/12, for example, ZEISS provided over 500,000 euros to the fund.
Boards of trustees at the sites, comprised of cultural, political and societal representatives decide on how the funds will be used. The Promotion Fund will be expanded to projects in
Göttingen and Wetzlar from fiscal year 2012/13.
1
Annual Report 2011/2012
4
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Business Principles
Corporate Code of Conduct
ZEISS is committed to perfect solutions, special
services and highest standards, not only in
technological terms. Also with regard to the "rules"
of good and fair behavior ‐ we strive for outstanding
results.
In 2007, ZEISS adopted a corporate code of conduct,
defining basic rules for all business activities. This
code has proved to be effective. For complying with
the code’s principles, ZEISS is being rewarded
everyday ‐ with business confidence and a high
reputation of its brand. It is our firm belief that a
sustainable economic success is inseparable
connected to our conduct.
After five years, we have revised the code of conduct.
Some aspects such as product safety and protection
of personal data have been sharpened and the code
is now embedded into the corporate policies and
guidelines.
We would like to invite you to discover our code ‐ to
learn more about us and our culture. Pease visit us at
www.zeiss.com/smt
Sustainable use of resources
The sustainable use of resources and environmental
protection are very important to ZEISS. The company
emphasizes the respectful treatment of the
environment. A systematic environmental
management system ensures compliance with this
directive in business operations.
Carl Zeiss SMT – Code of Conduct
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2. Semiconductor Metrology Systems
The strategic business unit Semiconductor Metrology
Systems (SMS) is part of the Semiconductor
Manufacturing Technology (SMT) business group of
ZEISS.
As a leading global supplier of both metrology and
manufacturing equipment ZEISS SMS focuses on a key
component in semiconductor manufacturing process,
the photomask. ZEISS SMS develops, manufactures and
distributes advanced mask solutions along the mask
manufacturing chain empowering our customers in
the mask making industry to develop and
manufacture zero‐defect‐ and in‐specification‐
photomasks. We provide innovative solutions and spend
in average more than 25% of our net sales in research
and development. Carl Zeiss SMT – Organizational Structure
All our solutions are focused on optimizing the
performance of a photomask. Our customer’s benefit is
manifold:
‐ an out of specification photomask can be brought
back into specification avoiding costly an resource
consuming remanufacturing,
‐ our tools enable to achieve specifications which
could not be reached without them enabling to
produce next generation photomasks
‐ the wafer fab benefits obtaining a widened
process window which gives higher yields and
better performance of the electronic devices.
The design and manufacturing of our tools follow the
highest standards in safety and environmental
MeRiT® HR II
requirements determined in the guidelines of ZEISS and
German law.
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Version 02
SMS Product Portfolio
The systems developed and
manufactured by Carl Zeiss SMS play
an important role in enabling the
Semiconductor Industry to
continuously introduce new
electronic products that perform
better than previous generations and
use less energy per electronic
function. Also, by producing more
powerful chips the S/C industry
contributes to improve the quality of
life of people world‐wide by
introducing affordable
communication, by generating new
devices and technologies in medical
treatment and health care and by
enabling our economies to grow.
In the process flow of mask
manufacturing our tools reduce the
need for remanufacturing of
photomasks which are out of
specifications. By this function our
tools inherently serve to save costs,
material and resources and thereby
positively contribute to sustainability. ZEISS SMS solutions along the mask manufacturing chain
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Commitment to Sustainability
Being aware of its responsibility, ZEISS is supporting a
multitude of environmental and social related projects.
Girl’s day
To arouse the interest of girls in technical professions,
the girl’s day was brought into being. Children get the
chance of getting to know the fields of activity of the
enterprise.
Carl Zeiss Energie GmbH
In October 2013, the Carl Zeiss Energie GmbH was
founded. With this new legal entity, a lasting
improvement of energy efficiency shall be reached. ZEISS
also starts the sensitization of the employees with the
campaign “Energie bei Zeiss” and a roadshow.
Fight against blindness
Since 2002 ZEISS is a sponsor of the “VISION 2020 – The
Right to Sight”, a global campaign under leadership of
World Health Organization (WHO) and International
Agency for The Prevention of Blindness (IAPB). The
campaign is aiming on improving medical supply in
economically poor regions to overcome avoidable
blindness until 2020.
Education Programs
SMS as part of ZEISS – Some fields of Dedication to Sustainability
ZEISS supports the professional development of its
employees by offering comprehensive and practical
training solutions to sharpen existing knowledge or
upgrade ones skill set.
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The SMS is focusing its improvement efforts on chosen core areas, e.g. ethics‐related trainings and assessments. To convey the significance of ethical behavior for the brand, an
extensive program of compliance trainings was finished in 2013. In addition, SMS is regularly performing the EICC‐ON Risk Assessment to quantify its compliance to the international
recognized code of conduct of the Electronic Industry Citizenship Coalition.
Electronic Industry Citizenship Coalition
The Electronic Industry Citizenship Coalition (EICC) establishes standards to ensure that working conditions in the electronics industry supply chain are safe, that workers are treated
with respect and dignity, and that business operations are environmentally responsible. A common Code of Conduct defines operating principles and provides guidance in five critical
areas of Corporate Social Responsibility performance: Labor, Health and Safety, Environment, Management System, Ethics.
EICC Code of Conduct Elements
Committed to the Code’s principles and willing to uphold its standards, SMS successfully finished an extensive self‐assessment process in FY 2011/2012 . The result confirmed our
conformity to the EICC Code of Conduct.
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3. Metrics, Trends and Results
3.1. Environment
Measuring and reducing the environmental footprint
In 2011, Carl Zeiss SMS GmbH initiated a common sustainability project, involving the Zeiss Business Units located at the Jena facility:
‐ Carl Zeiss SMS GmbH
‐ Carl Zeiss Jena GmbH
‐ Carl Zeiss Meditec AG
‐ Carl Zeiss Microscopy GmbH.
The projects goal is to measure and reduce the environmental footprint of the production activities of these ZEISS units.
The following aspects were considered as essential to describe the units impact on environment:
‐ CO2 emissions
‐ energy consumption
‐ composition/amount of waste
‐ water consumption
‐ solvents
To focus on efficiency‐based parameters, the consumption and emission data for all of these aspects were put in relation to the sum of hours of production at Jena site. Comparing the
evaluation of the last two years, changes are recognizable. Nevertheless, the data base is today too small to analyze a long‐term trend.
Energy and Water Consumption
The water consumed at ZEISS’ Jena Site is
provided by a municipal water supplier water consumption
which is serving 20.000 real estates;
energy consumption
(liter per productive hour, site Jena)
sourcing two‐thirds of the water from the (kWh per productive hour, site Jena)
ground (45 wells, 5 springs). The water is 25
20,26 21,18
sourced from the Ohra‐Talsperre, a 20 18,24
20
16,65
reservoir located in the Thuringian Forest.
15 15
The consumption of ZEISS’ production site
Lichtenhain in Jena is not significant (less 10 10
than 5% of the volume). Before channeling
5 5
used water into the local water treatment
plants through the public sewer systems, 0 0
an appropriate pretreatment is being 2011 2012 2013 2014 2015 2016 2017 2011 2012 2013 2014 2015 2016 2017
realized. At the Jena facility, 21,18 liter of target corridor: energy consumption
target corridor: water consumption water consumption factor [l/h]
water were consumed to realize one hour energy consumption factor [kWh/h]
of production. Compared to 2011 level,
the amount did not change significantly.
The energy consumption raised by 10%, mainly caused by the usual changes of the weather conditions. The course of air humidity and temperature are influencing the need for energy
of the central acclimatization system of this site.
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Version 02Waste management
Waste is systematically sorted. All office materials are waste
selected and used with environmental aspects in (kg per productive hour, site Jena)
mind. And the path followed by the product to the
customer’s doorstep is also carefully monitored: every 0,25
0,22
day, experts in the company seek the best solutions 0,20
0,20
for packaging and transportation.
Higher production volumes caused a raise of disposed 0,15 0,12 0,13
oil‐water‐emulsion, effecting the quantity of 0,10
hazardous waste in 2012. Also, parts of the building
0,05
were reconstructed, which temporarily caused an
increased amount of non‐hazardous waste. 0,00
2011 2012 2013 2014 2015 2016 2017
Emissions
Production at Carl Zeiss plants in Jena creates target corridor: waste non‐hazardous [g/h] target corridor: waste hazardous [g/h]
emissions, most notably CO2 and solvents (volatile waste non‐hazardous [g/h] waste hazardous [g/h]
organic carbon compounds, or VOCs) released in the
cleaning shops.
CO2 emission
CO2 emissions are calculated as an
CO2 emission solvents
equivalent of the thermal energy
(metric tons, site Jena) (kg per productive hour, site Jena)
consumed by all of the tenants at the Jena
building, including Non‐ZEISS companies.
In 2012, CO2 emissions from thermal 5000 4.523 39,54
energy decreased by 17% at Jena, mostly 4500 40,0 38,16
4000
caused by a change in utilization of the 3.765
3500
cold machines in the acclimatization 3000 22,31 21,25
system. 2500 20,0
2000 10,49
9,60
Solvents 1500
Benchmarks show that cleaning 1000
technology for optical manufacturing has 500 0,0
0 2011 2012 2013 2014 2015 2016 2017
already reached a very high standard, and 2011 2012 2013 2014 2015 2016 2017
as a result further reductions of emissions
are scarcely possible. Nevertheless, the target corridor: solvents consumtion target corridor: waste (recycled)
amount decreased in all solvents target corridor: CO2 emission CO2 emission site Lichtenhain [t]
target corridor: air/water emission waste (recycled) [g/h]
categories. We will strive to reduce the air/water emission [g/h] consumed solvents factor [g/h]
low level of VOC emissions achieved to
date even further wherever possible.
11
Version 023.2. Labor, Human Rights, Health & Safety
ZEISS is caring for its people. From home office
regulations to different employment types to
support for employees with elder‐care total workforce average hours of training
responsibilities ‐ ZEISS is providing a flexible work
environment that support the work/life needs to
250
different employees. 7
3 16
200
3
Developed with feedback from stakeholders, the 14
11,71
SMS started to transform their Corporate 150 0 12
Responsibility Report according to the 10
224
100 8
international reporting standard of the Global 171
192
6 4,86
Reporting Initiative (GRI). We are now expanding 50
130 4,16
4
our Report by adding indicators which are related
2 0,67
to Human Rights and Labor. This year, we are 0
0
publishing our data the first time. 2009 2010 2011 2012
2009 2010 2011 2012
Labor and Human Rights data are SMS specific and
cover our facilities in Jena, Oberkochen, Rossdorf Total Number of Employees external workforce
and Karmiel (Israel). (as per December, 31st ‐ excluding worldwide service teams)
Develop the talents needed
type of contract employment type
Since 2009, SMS’ workforce increased significantly.
This reflects the quick growth of our business. It
also indicates a raising need for training, especially 216 250 9
188 6
with regard to our new employees. To cover this 200 166 200 4
additional need, the SMS division almost doubled 150 128 1
150
the efforts in training compared to 2011 levels. In 100 100 215
167 186
average, 12 hours per employee were invested for 50 50
129
2 0 5 3 4 3 8 7
expanding the knowledge base. Most of the 0 0
trainings were organized by Campus, the internal 2009 2010 2011 2012 2009 2010 2011 2012
training program of ZEISS SMT. It provides varied
and interesting courses on current technologies permanent temporary external workforce
full‐time part‐time
and developments, processes and methods. To
(excluding external workforce)
support knowledge transfer, the speakers are
usually ZEISS employees.
The composition of contract and employment types did not change significantly. Due to the knowledge‐intensive technologies in our business environment, the rate won’t change
fundamentally.
12
Version 02Striving for zero incidents
Health and safety performance is a key measure of our organization’s duty of care. Low injury and absentee rates are generally linked to positive trends in staff morale and
productivity. Carl Zeiss SMS GmbH is striving for zero incidents. Our Indicator will show whether health and safety management practices are resulting in fewer occupational health
and safety incidents.
SMS' Total Recorded Injury Rate (TRI) SMS' Total Recorded Injury Rate (TRI)
[way‐to‐work accidents] [occupational injuries]
12,00
12,00
10,00
10,00
8,00 8,00
6,00 5,63
6,00
4,00
4,00 2,56
2,56 2,00
2,00
0,00 0,00
0,00 FY 10/11 FY 11/12
FY 10/11 FY 11/12
TRI = LTI + MTC (acc. to ILO‐standard) TRI = LTI + MTC (acc. to ILO‐standard)
LTI (LTI ‐ Lost Time Injuries) = (quantity of way‐to‐work‐accidents which caused absence > 1 day / working LTI (LTI ‐ Lost Time Injuries) = (quantity of work related injuries which caused absence > 1 day / working
hours) * 106 hours) * 106
MTC (MTC ‐ Medical Treatment Cases) = (quantity of way‐to‐work‐accidents which caused absence < 1 MTC (MTC ‐ Medical Treatment Cases) = (quantity of work related injuries which caused absence < 1 day /
day / working hours) * 106 working hours) * 106
Human Rights
We have not identified any operations with significant risk for child labor or forced or compulsory labor.
13
Version 023.3. Sustainability Projects – Achievements (first report)
To continuously improve the sustainability of our business activities, several improvement projects were started in August 2012. They relate to different aspects of sustainability, e.g.
Management System, Labor, Health & Safety and Environment. All of the projects are owned by the SMS.
Project 1: Implementing and updating a Business Recovery Plan status
SMS is implementing a Business Recovery Plan which defines a set of emergency measures for all sites of the SMS. Following the plan ensures the ability
to deliver and service our products which ensures business continuity in case of disruptive events.
The project consists of different sub targets such as a specific risk analysis, the definition of emergency procedures and training elements. Twice a year,
the target achievement is being reviewed.
Target 2012/2013
3 completed BCP´s incl. roll out for Jena, Rossdorf and Karmiel until Q IV/2013
Sub targets & measures 2012/2013:
sub target 1 sub target 1
‐ Realization of a business continuity plan for three of four SMS sites
sub target 2 sub target 2
‐ realize actions defined in the stage plan BRP (per locations)
sub target 3 sub target 3
‐ Training 100% of risk‐class‐I‐Manager in emergency procedures and processes until 12/2012 (initial training done)
sub target 4 sub target 4
‐ Emergency drill for management team (incl. site managers) until QII/2013
The number of tool orders made an expansion of our industrial capacities necessary. At the moment, the SMS is taking huge efforts to reorganize and
expand the clean room production area. Regarding sub target #4, an emergency drill was successfully performed at site Jena in October 2013. The roll‐out
to the other sites will be realized during the upcoming FY. After finishing the roll‐out, BCP‐ audits will be realized to verify the implementation.
For 2014, the following program is defined:
Target 2013/2014:
BCP roll out completed and implemented
Sub targets & measures 2013/2014:
sub target 1 sub target 1
‐ Emergency drill for management team (site managers) Rossdorf until QIV/2014
sub target 2 sub target 2
‐ Training 100% of risk‐class‐II and III‐Manager in emergency procedures and processes until 09/2014 (yearly instruction in future)
sub target 3 sub target 3
‐ BCP‐Audits (Jena, Rossdorf, Karmiel) – 2015
sub target 4 sub target 4
‐ Realization of follow up workshops (lessons learned) after the 3th. BCP‐Audit
14
Version 02Project 2: Continuous Reduction of overtime of specialists status
An effective and efficient recruiting process is supporting the reduction of overtime. Goal of project 2 is the reduction of the average time to hire new
employees.
Target 2012/2013:
average hiring time 3,75 months until Sept. 2013
Sub targets & measures in 2012/ 2013:
sub target 1 sub target 1
‐ optimize the recruitment process
sub target 2 sub target 2
‐ focus on pre‐selection by HR and manager (phone interviews, check of references) to improve
quality
sub target 3 sub target 3
‐ competency based interviews
sub target 4 sub target 4
‐ focus on clear milestones and deadlines for HR as well as for the managers in the process to increase
speed)
The hiring time was reduced successfully. We further strive to optimize our process, setting challenging goals for the upcoming months:
sub target 1
Target 2013/2014:
average hiring time 3 months until Sept. 2014
sub target 2
Sub targets & measures in 2013/2014:
sub target 1
‐ review and optimization of the process
sub target 2
‐ focus active sourcing approach to keep “pipeline” of candidates filled
15
Version 02Project 3: Realize Supplier‐Sustainability‐Program status
To develop SMS’ supply chain in terms of sustainability, a specific supplier sustainability program is being realized.
Target 2012/2013:
‐ realize a sharing of experiences / workshops regarding the sustainability program of the SMS with chosen Managed Suppliers
Sub targets & measures in 2012/2013:
sub target 1 sub target 1
‐ realization of 2 supplier‐sustainability‐assessments in FY2012/2013
sub target 2 sub target 2 open
‐ embedding of a Managed Supplier into a common SMS‐supplier‐sustainable‐design‐development project
In 2013/2014, we continue to develop our supply chain by further communicating sustainability expectations and performing assessments to our vendors.
Based on conducted pilot assessments in 2013 and benchmarking visits, the supplier sustainability program will be refined. Changes of the assessment
scope might be necessary, therefore a specific number of assessments is going to be defined within 2014.
Target 2013/2014:
continue to develop supply chain in terms of sustainability
Sub targets & measures 2014:
sub target 1
sub target 1
‐ EICC based questionnaire: acknowledgement for all managed suppliers; target approval rate of > 70% within 2014
sub target 2
‐ refinement of supplier sustainability program and further roll out sub target 2
sub target 3
‐ definition an appropriate number of sustainability assessments within 2014 sub target 3
sub target 4 (from previous fiscal year)
‐ embedding of a Managed Supplier into a common SMS‐supplier‐sustainable‐design‐development project sub target 4
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Version 02Project 4: Develop SMS‐Tools with sustainable content > 5% until 2015 status
For our company to grow and secure its growth in the future, it needs to embed sustainability into our products. Appropriate indicators need to be
developed to identify the impact of our tools in terms of the environment. SMS is focusing on the energy efficiency of its products and a sustainable
product and packaging design.
Energy efficiency of products
Measuring and analyzing the energy consumption of our tools and components during the production process is very much depending on the degree of
capacity utilization at our customers sites. High production activity required a temporal moving of this project. In QI/2014 we will further look for project
partners to monitor the energy consumption of our tools during the production process at the facility of a customer.
Sustainable product & packaging design
The Substitution Principle in sustainability is the maxim that processes, services and products should, wherever possible, be replaced with alternatives
which have a lower impact on the environment. Following this principle, the SMS is analyzing the content of its products to identify such alternatives. The
amount and type of packaging material is also part of this research.
Target 2012/2013:
define the 5 important key sustainable performance indicators for the new SMS‐product generation until QIII/2013
Sub targets & measures in 2012/2013:
subtarget 1 sub target 1 open
‐ definition of common sustainability requirements for design, packaging and energy efficiency (metrics: accordance with CEA‐requirements; technical
feasibility)
subtarget 2 sub target 2 open
‐ common kick‐off meeting within SCM/Q/R&D and managed/ preferred suppliers of CZ SMT group at the next supplier day (Oct. 2013); start of research
groups involving both parties to investigate further component‐related sustainability projects
Target 2013/2014:
Realizing a sustainable content of 5% at common SMS‐supplier‐development‐projects for the new tool generation
Sub targets & measures in 2013/2014:
subtarget 1
‐ realization of pre‐project with important SMS customer to measure and analyze the consumption of tools and components in the production cycle
sub target 1
(metric: achievement of the project goals/compliance to budget and time targets)
subtarget 2
main project of SMS R&D‐department with chosen managed suppliers, involving chosen components for tools of the new generation until QIII 2015
sub target 2
subtarget 3
‐ Follow up with customer: lessons learned about CIP‐measures for prospective common sustainability projects
subtarget 4
‐ creating KPI’s (after baseline evaluation)
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Version 024. Summary
With publication of this 2nd version of the sustainability program we confirm the content of our sustainability program and emphasize our aim of realizing it. The results of our first
review, described in chapter 4, show that a further progress must be obtained on almost all subject areas.
‐ The definition and improvement of supplier related requirements in terms of sustainable design, packaging and energy efficiency must be continued.
‐ A common sustainable‐design‐project with one of our suppliers could not be realized.
‐ The supplier sustainability program needs to be refined.
Nevertheless, many improvements have been implemented.
‐ Metrics, trends and targets for consumptions and emissions were defined at the Jena site; first analysis were made.
‐ Additional indicators for Labor, Human Rights and Health & Safety were included, following the GRI‐format.
‐ Nearly all sustainability related improvement projects were finished in time.
The next reporting about the sustainability program is planned in November 2014. In the meantime, we will continue to increase the meaningfulness of our indicators. The SMS will
furthermore pursue sustainability within the ZEISS group.
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Version 02Copyright © 2013 Carl Zeiss SMS GmbH
Download this document at
http://smt.zeiss.com/semiconductor‐manufacturing‐technology/en_de/about‐us/responsibility‐‐‐sustainability.html
We value your interest in our report and welcome questions,
comments and improvement suggestions.
Please use the following email address to contact us.
info.sms@zeiss.com
Sustainability Reporting
19
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